Integration of Tunable Capacitors and Bonded-Wires for Contactless RF Switch and Tunable Filter

論文發表人：陳世叡 (南加州大學電機所博士班)

 

http://www.transducers09.org/

 

本文提出由表面微機電加工可調式電容及黏合線所組成的非接觸式微機電射頻開關。這個微機電射頻開關在2.4GHz的窄頻範圍可以達到10dB的能量隔離及4比1的電容變化。採用黏合線的方法可以大幅的減少可調式電容中移動平板的變形需求。更可以進一步允許氧化鋅壓電薄膜被用於改變電容的空氣間隙。如此形成一個非接觸式微機電射頻開關。

 

This paper describes a contactless RF MEMS switch, composed of two surface-micromachined tunable capacitors and two bonded-wire inductors, which can achieve a power isolation ratio of 10 dB with a capacitance variation of mere 4:1 over a narrow bandwidth near 2.4 GHz.  This novel approach of using inductors eases the deflection requirement for the deformable bridge for the variable capacitor, and allows piezoelectric ZnO film to be used to deflect the capacitor bridge to vary the air gap, thus yielding a contactless RF switch.