PARYLENE COATED SILICON PROBES FOR NEURAL PROSTHESIS

論文發表人：黃奎瑞 (加州理工學院電機博士班)

http://dellfc01.acae.cuhk.edu.hk/ieee-nems/nems08/index.html

Silicon neural prosthetic probes require reliable sensing electrodes able to access deep cortical structures without breakage. However, manufacturing limitations have prevented a strong and biocompatible silicon electrode array from reaching this goal. We here demonstrate the first high-density, parylene-coated silicon probe (1.2 cm long) with micro-fabricated electrodes that is able to be inserted in vivo without failure. This work also presents new experimental results for array shank deflection testing, lifetime soak testing as well as the in vitro electrical characterization of the gold and platinum micro-electrodes. These results allow us to optimize the geometry and treatment for both the silicon probe and the metal electrodes.

電子神經探針系統所使用的矽探針需要一個能進入深表皮層的同時又不會遭到破壞的可靠檢測電級。然而，製作過程的局限大幅限制了一個堅固且生物相容的電級列陣達到這樣的目標。在本文中，我們展示了第一個高密度且經parylene(聚對二甲苯基) 包覆的矽探針並以微小技術製造的電極。此一探針能夠成功地使用在活體穿透實驗。此外，本文也提出了新的實驗結果；包括了探針列陣偏折測試、浸泡測試、以及金和白金微電極的體外電子特性描述。這些實驗結果可讓我們對於矽探針及金屬電極在形狀、排列、以及製作程序上做到最佳化。