Electrical and Mechanical Properties of Conducting Polymer Blend PEDOT/PVA in Microelectronicmechanical Applications

論文發表人:陳常修 (加州大學爾灣分校材料系博士班)

 

http://www.mrs.org/s_mrs/doc.asp?CID=17622&DID=228224

 

高導電度高分子PEDOT：PSS跟強韌合成高分子PVA混合之微機電系統可以形成高結構性的材料，他們在生物微機電領域光電領域有高度的應用並可以增加其拉伸強度，耐用度及柔軟度，詳細的製程將會介紹，利用四點探針的方式可以測量交流電及直流電的特性，在機械強度方面,經由測量元件的共振強度及電容測量可以得知楊氏系數及拉伸強度，此混合性高分子的楊氏系數大約是1-5GPa，這些低楊氏系數的高分子可以將微機電或是其他相關元件微小化並增加其柔軟度,這是矽半導體所做不到的，另外高分子的壓阻特性也被發現，結合這些特殊的機械性質，如低楊氏系數及高應變規，再加上高導電度及柔軟度，將可以加強甚至取代現在應變規的材料多晶矽。

High conductivity polymer Poly(3,4-ethlenedioxythiophene)/poly(styrenesulfonate) (PEDOT:PSS) and strong synthetic polymer polyvinyl Alcohol (PVA) were mixed and prepared to the structure materials of microelectromechanical systems (MEMS). It has tremendous applications in BioMEMS areas and optical electronic fields and leads to increase tensile strength, durability and flexibility. Detailed process of fabrication technique will be presented. The AC and DC electrical properties of the thin films are studied using the four point probe method. For the mechanical properties, such as Young's Modulus and tensile strength of the thin films were measured by resonance frequency and capacitance measurement. Young's Modulus of polymer blends are about 1-5GPa. These lower than metals' Young's Modulus polymers can minimize the dimension of MEMS devices and other applications need flexible devices which silicon semiconductor couldn't perform. In addition, piezoresistive property has also been found in polymer blends of PEDOT/PVA. Combined with low Young's Modulus, high strain gauge factor materials are introduced. It also features high conductive and flexible properties and will extend the applications of the current popular strain gauge material polycrystalline silicon.