Electrical and Mechanical Properties of Conducting Polymer Blend PEDOT/PVA in Microelectronicmechanical Applications
High conductivity polymer Poly(3,4-ethlenedioxythiophene)/poly(styrenesulfonate) (PEDOT:PSS) and strong synthetic polymer polyvinyl Alcohol (PVA) were mixed and prepared to the structure materials of microelectromechanical systems (MEMS). It has tremendous applications in BioMEMS areas and optical electronic fields and leads to increase tensile strength, durability and flexibility. Detailed process of fabrication technique will be presented. The AC and DC electrical properties of the thin films are studied using the four point probe method. For the mechanical properties, such as Young's Modulus and tensile strength of the thin films were measured by resonance frequency and capacitance measurement. Young's Modulus of polymer blends are about 1-5GPa. These lower than metals' Young's Modulus polymers can minimize the dimension of MEMS devices and other applications need flexible devices which silicon semiconductor couldn't perform. In addition, piezoresistive property has also been found in polymer blends of PEDOT/PVA. Combined with low Young's Modulus, high strain gauge factor materials are introduced. It also features high conductive and flexible properties and will extend the applications of the current popular strain gauge material polycrystalline silicon.